Lithography Tshuab Mask Aligner Yees Duab-Etching Tshuab
Khoom taw qhia
Lub teeb pom kev zoo tau txais cov khoom siv UV LED thiab lub teeb pom kev zoo, nrog cov cua sov me me thiab lub teeb pom kev zoo.
Lub teeb pom kev zoo ntawm lub teeb pom kev zoo muaj cov txiaj ntsig zoo thaum tshav kub kub dissipation thiab lub teeb pom kev zoo nyob ze, thiab lub teeb mercury hloov thiab txij nkawm yog yooj yim thiab yooj yim. Nruab nrog lub siab magnification binocular dual teb microscope thiab 21 nti dav npo LCD, nws tuaj yeem pom pom los ntawm
eyepiece los yog CCD + zaub, nrog kev sib raug zoo siab, cov txheej txheem intuitive thiab ua haujlwm yooj yim.
Nta
Nrog fragment processing muaj nuj nqi
Leveling tiv tauj siab ua kom rov ua dua los ntawm sensor
Qhov sib txawv ntawm qhov sib txawv thiab qhov sib txawv ntawm qhov sib txawv tuaj yeem teeb tsa digitally
Siv embedded computer + kov npo ua haujlwm, yooj yim thiab yooj yim, zoo nkauj thiab dav
Rub hom nce thiab nqis phaj, yooj yim thiab yooj yim
Txhawb nqa kev sib cuag lub tshuab nqus tsev, kev sib cuag nyuaj, kev sib cuag siab thiab qhov sib thooj
Nrog nano imprint interface muaj nuj nqi
Ib txheej raug nrog ib qho tseem ceeb, qib siab ntawm automation
Lub tshuab no muaj kev ntseeg tau zoo thiab ua qauv qhia yooj yim, tshwj xeeb tshaj yog tsim rau kev qhia, kev tshawb fawb tshawb fawb thiab cov chaw tsim khoom hauv Cov Tsev Kawm Qib Siab thiab cov tsev kawm qib siab
Paub meej ntxiv
Specification
1. Qhov Loj: 110mm × 110mm;
2. ★ Tshaj tawm wavelength: 365nm;
3. Kev daws teeb meem: ≤ 1m;
4. Alignment qhov tseeb: 0.8m;
5.Qhov ntau yam ntawm cov lus scanning ntawm qhov kev sib dhos yuav tsum muaj tsawg kawg yog raws li: Y: 10mm;
6. Sab laug thiab sab xis lub teeb ntawm txoj kab sib dhos tuaj yeem txav tau sib cais hauv X, y thiab Z cov lus qhia, X kev taw qhia: ± 5mm, Y kev taw qhia: ± 5mm thiab Z kev taw qhia: ± 5mm;
7. Lub ntsej muag loj: 2.5 nti, 3 nti, 4 nti, 5 nti;
8. Qauv loj: fragment, 2 ", 3", 4 ";
9. ★ Haum rau cov qauv tuab: 0.5-6mm, thiab tuaj yeem txhawb nqa 20mm cov qauv ntawm feem ntau (customized);
10. Hom raug: sij hawm (countdown hom);
11. Cov teeb pom kev tsis sib xws: ＜ 2.5%;
12. Dual field CCD alignment microscope: zoom lens (1-5 zaug) + microscope objective lens;
13. Lub zog stroke ntawm lub npog ntsej muag txheeb ze rau cov qauv yuav tsum muaj tsawg kawg nkaus: X: 5mm; y: 5 mm;. :6º
14. ★ Tawm lub zog ceev:> 30MW / cm2,
15. ★ Txoj haujlwm sib dhos thiab qhov chaw raug ua haujlwm hauv ob lub chaw nres tsheb, thiab ob lub chaw nres tsheb servo lub cev muaj zog hloov tau;
16. Leveling tiv tauj siab kom rov ua dua los ntawm sensor;
17. ★ Qhov sib txawv ntawm qhov sib txawv thiab qhov sib txawv tuaj yeem raug teeb tsa digitally;
18. ★ Nws muaj nano imprint interface thiab sib thooj interface;
19. ★ Kov npo ua haujlwm;
20. Zuag qhia tag nrho qhov ntev: Txog 1400mm (ntev) 900mm (dav) 1500mm (qhov siab).
