Lithography Lub Cav Npog Ua Yeeb Yam Duab-Etching Tshuab
Khoom Taw Qhia
Qhov chaw raug teeb meem admmed UV LED thiab lub teeb ci ntsa iab module, nrog tshav kub me me thiab lub teeb zoo me me.
Cov qauv inverted muaj cov nyhuv kub tsis txaus thiab hloov mercury teeb thiab kev txij nkawm yog yooj yim thiab yooj yim. Nruab nrog lub siab loj binocular dual teb tsom thiab 21 nti dav dav hlau LCD, nws tuaj yeem pom tau mus raws li
qhov muag daj lossis CCD + tso saib, nrog cov txheej txheem siab, cov txheej txheem kev txawj ntse thiab cov haujlwm yooj yim.
Nta
Nrog fragment ua haujlwm
Leveling hu rau siab ua kom muaj peev xwm ua kom rov qab los ntawm sensor
Cov txheej txheem sib txawv thiab kis tau sib txawv tuaj yeem tsim cov digitally
Siv computer + kov tshuaj ntsuam kev ua haujlwm, yooj yim thiab yooj yim, zoo nkauj thiab dav
Rub cov hom nce thiab nqis phaj, yooj yim thiab yooj yim
Txhawb Nqa Lub Tshuab Nqus Kev Sib Ntsib, kev nyuaj sib xws, kev sib tiv tauj kev sib tiv tauj thiab sib ze
Nrog nano imprint interface muaj nuj nqi
Ib txheej kev kis nrog ib tus yuam sij, qib siab ntawm kev siv tshuab
Lub tshuab no muaj kev ntseeg tau zoo thiab yooj yim haum rau kev qhia, kev tshawb fawb thiab cov chaw ua haujlwm hauv tsev kawm qib siab thiab cov tsev kawm qib siab
Xav paub meej ntxiv
Kev qhia tshwj xeeb
1. Raug rau Cheeb Tsam: 110mm × 110mm;
2. ★ Raug Wavosength: 365nm;
3. Kev daws teeb meem: ≤;
4. Cov txheej txheem sib txawv: 0.8m;
5.Qhov cov lus tau zoo ntawm cov lus scanning ntawm cov txheej txheem sib dhos yuav tsum muaj tsawg kawg nkaus: Y: 10mm;
6. Sab laug thiab sab xis ntawm lub cev ntawm cov kab ke tuaj yeem txav tau sib txawv hauv x, x qhia: ± 5 hli thiab z kev taw qhia: ± 5 hli;
7. Ntsej Muag Loj: 2.5 nti, 3 nti, 4 ntiv tes, 5 ntiv;
8. Qauv loj: Fragent, 2 ", 3", 4 ";
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10. Kev Raug Mob Hom: Sijhawm (Countdown);
11. Tsis muaj kev sib txuam ntawm teeb pom kev zoo: <2.5%;
12. Dual daim teb CCD dlhos tsom iav: zoom lub lens (1-5 zaug) + tsom iav + lub cim lens;
13. Tus mob stroke ntawm lub npog ntsej muag rau cov qauv yuav tsawg kawg: X: 5mm; Y: 5mm; : 6º;
14. ★ Sprosing Zog ntom:> 30MW / CM2,
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16. Txoj kev sib cuag siab nyiam ua kom muaj peev xwm ua kom rov ua tiav los ntawm sensor;
17. ★ Qhov sib txawv ntawm cov kev sib txawv thiab kis tau qhov sib txawv tuaj yeem tsim cov digitalally;
18. ★ Nws muaj nano imprint interface thiab sib thooj sib cuam tshuam;
19. ★ Kov Screen kev ua haujlwm;
20. Tag nrho qhov ntev: Txog 1400mm (ntev) 900mm (dav) 1500 hli (qhov siab).
